Measurement Possibilities



№    

Parameters to measure

Devices                                  

 

Measurement           Accuracy 


              

 

Measurement Range

 

1.

Linear Dimensions

TESA Micro Hite 3D
NewView 7200
Vickers Microscope
IMC-100х50А

 

3 µm
0,3 µm
0,1 µm
5 µm

400x490x390mm
2mm
1mm
25x25mm

2.

Angular Dimensions

TESA Micro Hite 3D
Goniometer Г-5

3 µm/ 0,3m = 2 arc sec
1 arc sec

300mm
360º

 

3.

Deviation from the form and mutual location

TESA Micro Hite 3D

3 µm

400x490x390mm

4.

Roughness

NewView 7200
MarSurf LD120

0,1 nm
2 nm

0,1 µm
0,1 mm

5.

Radii of curvature of test plates and spherical elements

IZS-7
OWI 50 HP

0,04% - 0,07%
0,001 mm

10-1000mm
0- 200mm

6.

Shape Deviation in accordance with ISO 10110-5 (PV, RMSa, RMSi, RMSt, Power, Irregularity)

 

 

 

6.1.

Spherical and Planar Surfaces

µPhase FST 10
VeriFire Asphere
OWI 100
OWI 50 HP
OWI 50 Plano
MarSurf LD120

 

 

 

λ/20 (0,03 µm) ; 0,1N
λ/20 (0,03 µm) ; 0,1N
λ/10 (0,06 µm) ; 0,2N
λ/10 (0,06 µm) ; 0,2N
λ/10 (0,06 µm) ; 0,2N
0,1 µm

0 - 60mm
0 - 850mm
0 - 400mm
0 - 200mm
   -
30mm

6.2.

Aspherical Surfaces

VeriFire Asphere
MarSurf LD120

λ/20 (0,03 µm) ; 0,1N
0,1 µm

0 - 850mm
30mm

7.

Parameter of optical glass

 

 

 

7.1.

Index of refraction

PE Lambda 950

0,001

1,4 – 2,0

7.2.

Stress in glass (birefringence)

PKS-250

3 nm/cm

0 – 300 nm/cm

8.

Parametres of Optical Devices and Systems

 

 

 

8.1.

MTF фfunction

µPhase FST 10

0,01%

0 - 1000 lp/mm

8.2.

Wavefront distortion

µPhase FST 10

λ/20 (0,03 µm) ; 0,1N

0 - 60mm

8.3.

BAch focal lenght and flange distance

µPhase FST 10

0,001mm

0 - 60mm

8.4.

Optical power (diopters)

Dioptrometer LM-35

0,01 dpt

- 30 dpt …..+30 dpt

8.5.

Decentering of optical components and assemblies

Autocollimator

15 arc sec

0 – 2º

9.

Parametres of optical coatings

 

 

 

9.2.

Transmission

PE Lambda 950
FTIR 8400S

0,01%
0,01%

0 - 100%
0 - 100%

9.3.

Reflection

FTIR 8400S

0,01%

0 - 100%

 

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